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introduction the agilent B1500A semiconductor device analyzer with easyexpert software is a complete parametric test solution. it supports all aspects of parametric test, from basic manual measurement to test automation across a wafer in conjunction with a semiautomatic wafer prober. because the B1500A utilizes the microsoft ? windows ? xp professional operating system, it integrates easily into your pc-based work environment. best of all, the familiar windows graphical user interface (gui) and convenient online help menus minimize the need for instrument training. agilent B1500A semiconductor device analyzer technical overview
2 basic features ? pc-based instrument with touch screen interface; optional usb keyboard and mouse available ? easyexpert software with over 200 categorized application tests supplied with the instrument ? performs current versus voltage (iv) measurements ? performs capacitance versus voltage (cv), capacitance versus time (ct) and capacitance versus frequency (cf) measurements ? performs quasi-static cv (qscv) measurements ? high voltage pulse forcing up to 40 v with alwg and voltage monitor capabilities. ? performs fast iv measurement synchro- nized with the applied waveforms for accurate transient iv or time-domain measurements ? front-panel classic test measurement modes supported: single-channel sweep, multi-channel sweep, time sampling, list sweep, cv sweep and direct control (gpib flex) ? gui-based control of the agilent b2200a, and b2201a switching matrices ? modular mainframe with ten module slots and one 4.2 a ground unit ? multiple source/monitor unit (smu) types available: medium power (mpsmu), high-power (hpsmu), and high-resolution (hrsmu) ? multi-frequency capacitance measure- ment unit (mfcmu) available ? high-voltage semiconductor pulse generator unit (hv-spgu) available ? waveform generator/fast measurement unit (wgfmu) available ? high-resolution, analog-to-digital converter (adc) available to all installed smus ? high-speed adc present on each installed smu ? smu/aux path switching supported on the atto-sense and switch unit (asu) ? smu/mfcmu switching supported using smu cmu unify unit (scuu) and guard switch unit (gswu) ? mfcmu automatically identi? es capacitance measurement accessories ? wgfmu/smu path switching supported on the remote-sense and switch unit (rsu) ? gpib port for instrument control ? self-test, self-calibration, diagnostics speci? cation conditions this document lists speci? cations and supplemental information for the B1500A and its associated modules. the speci? ca- tions are the standards against which the B1500A and its associated modules are tested. when the B1500A and any of its associated modules are shipped from the factory, they meet the speci? cations. the supplemental information and typical entries in the following speci? cations are not warranted, but provide useful informa- tion about the functions and performance of the instrument. B1500A speci? cation supported plug-in modules the B1500A supports ten slots for plug-in modules. part number description slots occupied range of operation measure resolution b1510a high power source/monitor unit (hpsmu) 2 -200 v to 200 v, -1 a to 1 a 2 v, 10 fa b1511a medium power source/monitor unit (mpsmu) 1 -100 v to 100 v, -100 ma to 100 ma 0.5 v, 10 fa b1517a high resolution source/monitor unit (hrsmu) 1 -100 v to 100 v, -100 ma to 100 ma 0.5 v, 1 fa e5288a1 atto-sense and switch unit (asu) -100 v to 100 v, -100 ma to 100 ma 0.5 v, 100 aa b1520a multi frequency capacitance measurement unit (mfcmu) 1 1 khz to 5 mhz 0.035 ffrms2 b1525a high voltage semiconductor pulse generator unit (hv-spgu) 1 40 v (80 vp-p) 50 v b1530a waveform generator/fast measurement unit (wgfmu) 1 pg mode: -3 v to 3 v, -5 v to 5 v fast iv mode: -3 v to 3 v, -5 v to 5 v, 0 v to 10 v, -10 v to 0 v 0.014 % of the range 3 1. this is connected with the b1517a high resolution smu. 2. dispersion of measurement values when connecting a dut 10 pf to the measurement terminals under the measurement condition o f frequency 1 mhz, signal level 250 mvac, and measurement time 1 plc. the display resolution is 0.000001 ff at 1 ff order by 6 digits displ ay. 3. display resolution the measurement and output accuracy are speci? ed at the rear panel connector terminals when referenced to the zero check terminal. the b1530a wgfmu measurement and output accuracy are speci? ed at the output terminal of the rsu. accuracy is speci? ed under the following conditions: 1. temperature: 23 c 5 c 2. humidity: 20 % to 60 % 3. after 40 minute warm-up followed by self-calibration 4. ambient temperature change less than 1 c after self-calibration execution, not applicable for mfcmu and wgfmu 5. measurement made within one hour after self-calibration execution, not applicable for mfcmu and wgfmu 6. calibration period: 1 year 7. smu integration time setting: 1 plc (1 na to 1a range, voltage range) 20 plc (100 pa range) 50 plc (1 pa to 10 pa range) averaging of high-speed adc: 128 samples per 1 plc 8. smu ? lter: on (for smus) 9. smu measurement terminal connection: kelvin connection 10. wgfmu load capacitance: 25 pf or less note: agilent technologies is responsible for removing, installing, and replacing the B1500A modules. contact your nearest agilent technologies to install and calibrate the B1500A modules
3 maximum module con? guration the B1500A can contain up to 4 dual-slot smus (hpsmus) and 2 single-slot smus (mpsmus and/or hrsmus); it can contain up to 10 single-slot smus (mpsmus and/or hrsmus); and it can contain any combination of dual-slot and single-slot smus between these two extremes. only one single-slot mfcmu can be installed per B1500A mainframe. up to ? ve single-slot hv-spgus can be installed per mainframe. up to ? ve single-slot wgfmus can be installed per mainframe. when one or more wgfmu modules are installed in the B1500A mainframe, the following table applies. multiply the values given below by the number of installed modules of that type and add the products together. the sum of the products must be less than or equal to 59 for the con? gura- tion to be permissible. mpsmu 2 hrsmu 2 hpsmu 14 mfcmu 7 hv-spgu 12 wgfmu 10 maximum voltage between common and ground 42 v ground unit (gndu) speci? cation the gndu is furnished standard with the B1500A mainframe. output voltage: 0 v 100 v maximum sink current: 4.2 a output terminal/connection: triaxial connector, kelvin (remote sensing) gndu supplemental information load capacitance: 1 f cable resistance: for i s 1.6 a: force line r < 1 ? for 1.6 a < i s 2.0 a: force line r < 0.7 ? for 2.0 a < i s 4.2 a: force line r < 0.35 ? for all cases: sense line r 10 ? where i s is the current being sunk by the gndu. mpsmu and hrsmu module speci? cations voltage range, resolution, and accuracy (high resolution adc) voltage range force resolution measure resolution force accuracy1 measure accuracy1 maximum current 0.5 v 25 v 0.5 v (0.018 % + 150 v) (0.01 % + 120 v) 100 ma 2 v 100 v 2 v (0.018 % + 400 v) (0.01 % + 140 v) 100 ma 5 v 250 v 5 v (0.018 % + 750 v) (0.009 % + 250 v) 100 ma 20 v 1 mv 20 v (0.018 % + 3 mv) (0.009 % + 900 v) 100 ma 40 v 2 mv 40 v (0.018 % + 6 mv) (0.01 % + 1 mv) 2 100 v 5 mv 100 v (0.018 % + 15 mv) (0.012 % + 2.5 mv) 2 1. (% of read value + offset voltage v) 2. 100 ma (vo 20 v), 50 ma (20 v < vo 40 v), 20 ma (40 v < vo 100 v), vo is the output voltage in volts. current range, resolution, and accuracy (high resolution adc) smu type current range force resolution measure resolution1 , 2 force accuracy3 measure accuracy3 maximum voltage hrsmu w/ asu 1 pa 1 fa 100 aa (0.9 %+15 fa) (0.9 %+12 fa) 100 v hrsmu 10 pa 5 fa 400 aa (with asu) 1 fa (hrsmu) (0.46 %+30 fa+10 aa x vo) (0.46 %+15 fa+10 aa x vo) 100 v 100 pa 5 fa 500 aa (with asu) 2 fa (hrsmu) (0.3 %+100 fa+100 aa x vo) (0.3 %+30 fa+100 aa x vo) 100 v mpsmu 1 na 50 fa 10 fa (0.1 %+300 fa+1 fa x vo) (0.1 %+200 fa+1 fa x vo) 100 v 10 na 500 fa 10 fa (0.1 %+3 pa+10 fa x vo) (0.1 %+1 pa+10 fa x vo) 100 v 100 na 5 pa 100 fa (0.05 %+30 pa+100 fa x vo) (0.05 %+20 pa+100 fa x vo) 100 v 1 a 50 pa 1 pa (0.05 %+300 pa+1 pa x vo) (0.05 %+100 pa+1 pa x vo) 100 v 10 a 500 pa 10 pa (0.05 %+3 na+10 pa x vo) (0.04 %+2 na+10 pa x vo) 100 v 100 a 5 na 100 pa (0.035 %+15 na+100 pa x vo) (0.03 %+3 na+100 pa x vo) 100 v 1 ma 50 na 1 na (0.04 %+150 na+1 na x vo) (0.03 %+60 na+1 na x vo) 100 v 10 ma 500 na 10 na (0.04 %+1.5 a+10 na x vo) (0.03 %+200 na+10 na x vo) 100 v 100 ma 5 a 100 na (0.045 %+15 a+100 na x vo) (0.04 %+6 a+100 na x vo) 4 1. speci? ed measurement resolution is limited by fundamental noise limits. minimum displayed resolution is 1 aa at 1 pa range by 6 digi ts. 2. measurements made in the lower ranges can be greatly impacted by vibrations and shocks. these speci? cations assume an environment free of these factors. 3. (% of read value + offset current (? xed part determined by the output/measurement range + proportional part that is multiplied by vo)) 4. 100 v (io 20 ma), 40 v (20 ma < io 50 ma), 20 v (50 ma < io 100 ma), io is the output current in amps.
4 power consumption voltage source mode voltage range power 0.5 v 20 x ic (w) 2 v 20 x ic (w) 5 v 20 x ic (w) 20 v 20 x ic (w) 40 v 40 x ic (w) 100 v 100 x ic (w) where ic is the current compliance setting. current source mode voltage compliance power vc 20 20 x io (w) 20 < vc 40 40 x io (w) 40 < vc 100 100 x io (w) where vc is the voltage compliance setting and io is output current. voltage range, resolution, and accuracy (high speed adc) voltage range force resolution measure resolution force accuracy1 measure accuracy1 maximum current 0.5 v 25 v 0.5 v (0.018 % + 150 v) (0.01 % + 250 v) 100 ma 2 v 100 v 2 v (0.018 % + 400 v) (0.01 % + 700 v) 100 ma 5 v 250 v 5 v (0.018 % + 750 v) (0.01 % + 2 mv) 100 ma 20 v 1 mv 20 v (0.018 % + 3 mv) (0.01 % + 4 mv) 100 ma 40 v 2 mv 40 v (0.018 % + 6 mv) (0.015 % + 8 mv) 2 100 v 5 mv 100 v (0.018 % + 15 mv) (0.02 % + 20 mv) 2 1. (% of read value + offset voltage v) 2. 100 ma (vo 20 v), 50 ma (20 v < vo 40 v), 20 ma (40 v < vo 100 v), vo is the output voltage in volts. current range, resolution, and accuracy (high speed adc) smu type current range force resolution measure resolution1 , 2 force accuracy3 measure accuracy3 maximum voltage hrsmu w/ asu 1 pa 1 fa 100 aa (0.9 %+15 fa) (1.8 %+12 fa) 100 v hrsmu 10 pa 5 fa 400 aa (with asu) 1 fa (hrsmu) (0.46 %+30 fa+10 aa x vo) (0.5 %+15 fa+10 aa x vo) 100 v 100 pa 5 fa 500 aa (with asu) 2 fa (hrsmu) (0.3 %+100 fa+100 aa x vo) (0.5 %+40 fa+100 aa x vo) 100 v mpsmu 1 na 50 fa 10 fa (0.1 %+300 fa+1 fa x vo) (0.25 %+300 fa+1 fa x vo) 100 v 10 na 500 fa 10 fa (0.1 %+3 pa+10 fa x vo) (0.25 %+2 pa+10 fa x vo) 100 v 100 na 5 pa 100 fa (0.05 %+30 pa+100 fa x vo) (0.1 %+20 pa+100 fa x vo) 100 v 1 a 50 pa 1 pa (0.05 %+300 pa+1 pa x vo) (0.1 %+200 pa+1 pa x vo) 100 v 10 a 500 pa 10 pa (0.05 %+3 na+10 pa x vo) (0.05 %+2 na+10 pa x vo) 100 v 100 a 5 na 100 pa (0.035 %+15 na+100 pa x vo) (0.05 %+20 na+100 pa x vo) 100 v 1 ma 50 na 1 na (0.04 %+150 na+1 na x vo) (0.04 %+200 na+1 na x vo) 100 v 10 ma 500 na 10 na (0.04 %+1.5 a+10 na x vo) (0.04 %+2 a+10 na x vo) 100 v 100 ma 5 a 100 na (0.045 %+15 a+100 na x vo) (0.1 %+20 a+100 na x vo) 4 1. speci? ed measurement resolution is limited by fundamental noise limits. minimum displayed resolution is 1 aa at 1 pa range by 6 digi ts. 2. measurements made in the lower ranges can be greatly impacted by vibrations and shocks. these speci? cations assume an environment free of these factors. 3. (% of read value + offset current (? xed part determined by the output/measurement range + proportional part that is multiplied by vo)) 4. 100 v (io 20 ma), 40 v (20 ma < io 50 ma), 20 v (50 ma < io 100 ma), io is the output current in amps. 100 50 20 -20 -50 -100 -100 -40 -20 20 40 100 current (ma) voltage (v) mpsmu and hrsmu measurement and output range
5 voltage range, resolution, and accuracy (high speed adc) voltage range force resolution measure resolution force accuracy1 measure accuracy1 maximum current 2 v 100 v 2 v (0.018 % + 400 v) (0.01 % + 700 v) 1 a 20 v 1 mv 20 v (0.018 % + 3 mv) (0.01 % + 4 mv) 1 a 40 v 2 mv 40 v (0.018 % + 6 mv) (0.015 % + 8 mv) 500 ma 100 v 5 mv 100 v (0.018 % + 15 mv) (0.02 % + 20 mv) 125 ma 200 v 10 mv 200 v (0.018 % + 30 mv) (0.035 % + 40 mv) 50 ma 1. (% of read value + offset voltage v) hpsmu module speci? cations voltage range, resolution, and accuracy (high resolution adc) voltage range force resolution measure resolution force accuracy1 measure accuracy1 maximum current 2 v 100 v 2 v (0.018 % + 400 v) (0.01 % + 140 v) 1 a 20 v 1 mv 20 v (0.018 % + 3 mv) (0.01 % + 140 v) 1 a 40 v 2 mv 40 v (0.018 % + 6 mv) (0.01 % + 1 mv) 500 ma 100 v 5 mv 100 v (0.018 % + 15 mv) (0.012 % + 2.5 mv) 125 ma 200 v 10 mv 200 v (0.018 % + 30 mv) (0.014 % + 2.8 mv) 50 ma 1. (% of read value + offset voltage v) current range, resolution, and accuracy (high resolution adc) current range force resolution measure resolution1 force accuracy2 measure accuracy2 maximum voltage 1 na 50 fa 10 fa (0.1 %+300 fa+1 fa x vo) (0.1 %+300 fa+1 fa x vo) 200 v 10 na 500 fa 10 fa (0.1 %+3 pa+10 fa x vo) (0.1 %+2.5 pa+10 fa x vo) 200 v 100 na 5 pa 100 fa (0.05 %+30 pa+100 fa x vo) (0.05 %+25 pa+100 fa x vo) 200 v 1 a 50 pa 1 pa (0.05 %+300 pa+1 pa x vo) (0.05 %+100 pa+1 pa x vo) 200 v 10 a 500 pa 10 pa (0.05 %+3 na+10 pa x vo) (0.04 %+2 na+10 pa x vo) 200 v 100 a 5 na 100 pa (0.035 %+15 na+100 pa x vo) (0.03 %+3 na+100 pa x vo) 200 v 1 ma 50 na 1 na (0.04 %+150 na+1 na x vo) (0.03 %+60 na+1 na x vo) 200 v 10 ma 500 na 10 na (0.04 %+1.5 n a+10 na x vo) (0.03 %+200 n a+10 na x vo) 200 v 100 ma 5 a 100 na (0.045 %+15 a+100 na x vo) (0.04 %+6 a+100 na x vo) 3 1 a 50 a1 a (0.4 %+300 a+1 a x vo) (0.4 %+150 a+1 a x vo) 3 1. speci? ed measurement resolution is limited by fundamental noise limits. 2. (% of read value + offset current (? xed part determined by the output/measurement range + proportional part that is multiplied by vo)) 3. 200 v (io 50 ma), 100 v (50 ma < io 125 ma), 40 v (125 ma < io 500 ma), 20 v (500 ma < io 1 a), io is the output cu rrent in amps.
6 1000 500 125 50 -50 -125 -500 -1000 -200 -100 -40 -20 20 40 100 200 current (ma) voltage (v) hpsmu measurement and output range power consumption voltage source mode voltage range power 2 v 20 x ic (w) 20 v 20 x ic (w) 40 v 40 x ic (w) 100 v 100 x ic (w) 200 v 200 x ic (w) where ic is the current compliance setting. current source mode voltage compliance power vc 20 20 x io (w) 20 < vc 40 40 x io (w) 40 < vc 100 100 x io (w) 100 < vc 200 200 x io (w) where vc is the voltage compliance setting and io is output current. current range, resolution, and accuracy (high speed adc) current range force resolution measure resolution1 force accuracy2 measure accuracy2 maximum voltage 1 na 50 fa 10 fa (0.1 %+300 fa+1 fa x vo) (0.25 %+300 fa+1 fa x vo) 200 v 10 na 500 fa 10 fa (0.1 %+3 pa+10 fa x vo) (0.25 %+2 pa+10 fa x vo) 200 v 100 na 5 pa 100 fa (0.05 %+30 pa+100 fa x vo) (0.1 %+20 pa+100 fa x vo) 200 v 1 a 50 pa 1 pa (0.05 %+300 pa+1 pa x vo) (0.1 %+200 pa+1 pa x vo) 200 v 10 a 500 pa 10 pa (0.05 %+3 na+10 pa x vo) (0.05 %+2 na+10 pa x vo) 200 v 100 a 5 na 100 pa (0.035 %+15 na+100 pa x vo) (0.05 %+20 na+100 pa x vo) 200 v 1 ma 50 na 1 na (0.04 %+150 na+1 na x vo) (0.04 %+200 na+1 na x vo) 200 v 10 ma 500 na 10 na (0.04 %+1.5 a+10 na x vo) (0.04 %+2 a+10 na x vo) 200 v 100 ma 5 a 100 na (0.045 %+15 a+100 na x vo) (0.1 %+20 a+100 na x vo) 3 1 a 50 a1 a (0.4 %+300 a+1 a x vo) (0.5 %+300 a+1 a x vo) 3 1. speci? ed measurement resolution is limited by fundamental noise limits. 2. (% of read value + offset current (? xed part determined by the output/measurement range + proportional part that is multiplied by vo)) 3. 200 v (io 50 ma), 100 v (50 ma < io 125 ma), 40 v (125 ma < io 500 ma), 20 v (500 ma < io 1 a), io is the output cu rrent in amps.
7 output terminal/connection dual triaxial connector, kelvin (remote sensing) voltage/current compliance (limiting) the smu can limit output voltage or current to prevent damaging the device under test. voltage: 0 v to 100 v (mpsmu, hrsmu) 0 v to 200 v (hpsmu) current: 10 fa to 100 ma (hrsmu with asu) 100 fa to 100 ma (hrsmu) 1 pa to 100 ma (mpsmu) 1 pa to 1 a (hpsmu) compliance accuracy: same as the current or voltage set accuracy. about measurement accuracy rf electromagnetic ? eld and smu measurement accuracy: smu voltage and current measure- ment accuracy can be affected by rf electromagnetic ? eld strengths greater than 3 v/m in the frequency range of 80 mhz to 1 ghz. the extent of this effect depends upon how the instrument is positioned and shielded. induced rf ? eld noise and smu measurement accuracy: smu voltage and current measurement accuracy can be affected by induced rf ? eld noise strengths greater than 3 v rms in the frequency range of 150 khz to 80 mhz. the extent of this effect depends upon how the instrument is positioned and shielded. pulse measurement pulse width: 500 sec to 2 s pulse period: 5 ms to 5 s period width + 2 ms (when width 100 ms) period width + 10 ms (when width > 100 ms) pulse resolution: 100 s smu pulse setting accuracy (? xed measurement range, supplemental information): width: 0.5 % + 50 s period: 0.5 % + 100 s supplemental information maximum allowable cable resistance (kelvin connection): sense: 10 ? force: 10 ? ( 100 ma), 1.5 ? (>100 ma) voltage source output resistance: (force line, non-kelvin connection) 0.2 ? (hpsmu) 0.3 ? (mpsmu, hrsmu) voltage measurement input resistance: 10 13 ? current source output resistance: 10 13 ? (1 na range) current compliance setting accuracy (for opposite polarity): for 1 pa to 10 na ranges: i setting accuracy 12 % of range for 100 na to 1 a ranges: i setting accuracy 2.5 % of range maximum capacitive load: 1 pa to 10 na ranges: 1000 pf 100 na to 10 ma ranges: 10 nf 100 ma and 1 a ranges: 100 f maximum guard capacitance: 900 pf (hpsmu, mpsmu, hrsmu) 660 pf (hrsmu with asu) maximum shield capacitance: 5000 pf (hpsmu, mpsmu, hrsmu) 3500 pf (hrsmu with asu) maximum guard offset voltage: 1 mv (hpsmu) 3 mv (mpsmu, hrsmu) 4.2 mv (hrsmu with asu, iout100 a) noise characteristics (? lter on): voltage source: 0.01 % of v range (rms.) current source: 0.1 % of i range (rms.) overshoot (typical, ? lter on): voltage source: 0.03 % of v range current source: 1 % of i range range switching transient noise (? lter on): voltage ranging: 250 mv current ranging: 70 mv slew rate: 0.2 v/s (maximum) voltage range, resolution, and accuracy (high speed adc) voltage range measure resolution measure accuracy1 , 2 0.5 v3 25 v (0.01 % + 250 v) 2 v 100 v (0.01 % + 700 v) 5 v3 250 v (0.01 % + 2 mv) 20 v 1 mv (0.01 % + 4 mv) 40 v 2 mv (0.015 % + 8 mv) 100 v 5 mv (0.02 % + 20 mv) 200 v 4 10 mv (0.035 % + 40 mv) 1. (% of read value + offset voltage v) 2. averaging is 128 samples in 1 plc. 3. only for mpsmu and hrsmu. 4. only for hpsmu. current range, resolution, and accuracy (high speed adc) current range measure resolution1 , 2 measure accuracy 3 1 pa 4 100 aa (1.8 %+12 fa) 10 pa 5 1 fa (0.5 %+15 fa+10 aa x vo) 100 pa 5 5 fa (0.3 %+30 fa+100 aa x vo) 1 na 50 fa (0.1 %+300 fa+1 fa x vo) 10 na 500 fa (0.1 %+2 pa+10 fa x vo) 100 na 5 pa (0.05 %+20 pa+100 fa x vo) 1 a 50 pa (0.05 %+200 pa+1 pa x vo) 10 a 500 pa (0.04 %+2 na+10 pa x vo) 100 a 5 na (0.03 %+20 na+100 pa x vo) 1 ma 50 na (0.03 %+200 na+1 na x vo) 10 ma 500 na (0.03 %+2 a+10 na x vo) 100 ma 5 a (0.04 %+20 a+100 na x vo) 1 a 6 50 a (0.4 %+300 a+1 a x vo) 1. speci? ed measurement resolution is limited by fundamental noise limits. minimum displayed resolution is 1 aa at 1 pa range by 6 digits. 2. measurements made in the lower ranges can be greatly impacted by vibrations and shocks. these speci? cations assume an environment free of these factors. 3. (% of read value + offset current (? xed part determined by the output/ measurement range + proportional part that is multiplied by vo) 4. 1 pa range is for hrsmu with asu. 5. 10 pa range and 100 pa range is for hrsmu with or without asu. 6. only for hpsmu.
8 measurement functions measurement parameters: cp-g, cp-d, cp-q, cp-rp, cs-rs, cs-d, cs-q, lp-g, lp-d, lp-q, lp-rp, ls-rs, ls-d, ls-q, r-x, g-b, z-, y- ranging: auto and ? xed measurement terminal: four-terminal pair con? guration, four bnc (female) connectors cable length: 1.5 m or 3 m, automatic identi? cation of accessories test signal frequency: range: 1 khz to 5 mhz resolution: 1 mhz (minimum) accuracy: 0.008 % output signal level: range: 10 mv rms to 250 mv rms resolution: 1 mv rms accuracy: (10.0 % + 1 mv rms ) at the measurement port of the mfcmu (15.0 % + 1 mv rms ) at the measurement port of the mfcmu cable (1.5 m or 3.0 m) output impedance: 50 ?, typical signal level monitor: range: 10 mv rms to 250 mv rms accuracy (open load): (10.0 % of reading + 1 mv rms ) at the measurement port of the mfcmu (15.0 % of reading + 1 mv rms ) at the measurement port of the mfcmu cable (1.5 m or 3 m) dc bias function dc bias: range: 0 to 25 v resolution: 1 mv accuracy: (0.5 % + 5.0 mv) at the measurement port of the mfcmu or the mfcmu cable (1.5 m or 3.0 m) maximum dc bias current (supplemental information) impedance range maximum dc bias current 50 ? 10 ma 100 ? 10 ma 300 ? 10 ma 1 k? 1 ma 3 k? 1 ma 10 k? 100 a 30 k? 100 a 100 k? 10 a 300 k? 10 a output impedance: 50 ?, typical dc bias monitor: range: 0 to 25 v accuracy (open load): (0.2 % of reading + 10.0 mv) at the measurement port of the mfcmu or the mfcmu cable (1.5 m or 3.0 m) sweep characteristics available sweep parameters: oscillator level, dc bias voltage, frequency sweep type: linear, log sweep mode: single, double sweep direction: up, down number of measurement points: maximum 1001 points measurement accuracy the following parameters are used to express the impedance measurement accuracy at the measurement port of the mfcmu or the mfcmu cable (1.5 m or 3.0 m). z x : impedance measurement value (?) d x : measurement value of d e = e p + (z s /|z x | + y o |z x |) x 100 (%) e p = e pl + e posc + e p (%) y o = y ol + y osc + y o (s) z s = z sl + z osc + z s (?) |z| accuracy e (%) accuracy e/100 (rad) c accuracy at d x 0.1 e (%) at d x > 0.1 e x ? (1 + d x 2 ) (%) d accuracy at d x 0.1 e/100 at d x > 0.1 e x (1 + d x )/100 g accuracy at d x 0.1 e/ d x (%) at d x > 0.1 e x ? (1 + d x 2 ) /d x (%) note: measurement accuracy is speci? ed under the following conditions: temperature: 23 c 5 c integration time: 1 plc or 16 plc mfcmu (multi frequency capacitance measurement unit) module speci? cations
9 parameters e posc z osc oscillator level e posc (%) z osc (m?) 125 mv < v osc 250 mv 0.03 x (250/ v osc - 1) 5 x (250/ v osc - 1) 64 mv < v osc 125 mv 0.03 x (125/ v osc - 1) 5 x (125/ v osc - 1) 32 mv < v osc 64 mv 0.03 x (64/ v osc - 1) 5 x (64/ v osc - 1) v osc 32 mv 0.03 x (32/ v osc - 1) 5 x (64/ v osc - 1) v osc is oscillator level in mv. parameters e pl y ol z sl cable length e pl (%) y ol (ns) z sl (m?) 1.5 m 0.02 + 3 x f/100 750 x f/100 5.0 3 m 0.02 + 5 x f/100 1500 x f/100 5.0 f is frequency in mhz. if measurement cable is extended, open compensation, short compensation, and load compensation must be performed. parameters y osc y o e p z s frequency y osc (ns) y o (ns) e p (%) z s (m?) 1 khz f 200 khz 1 x (125/ v osc C 0.5) 1.5 0.095 5.0 200 khz < f 1 mhz 2 x (125/ v osc C 0.5) 3.0 0.095 5.0 1 mhz < f 2 mhz 2 x (125/ v osc C 0.5) 3.0 0.28 5.0 2 mhz < f 20 x (125/ v osc C 0.5) 30.0 0.28 5.0 f is frequency in hz. v osc is oscillator level in mv. example of calculated c/g measurement accuracy frequency measured capacitance c accuracy1 measured conductance g accuracy1 5 mhz 1 pf 0.61 % 3 s 192 ns 10 pf 0.32 % 31 s 990 ns 100 pf 0.29 % 314 s 9 s 1 nf 0.32 % 3 ms 99 s 1 mhz 1 pf 0.26 % 628 ns 16 ns 10 pf 0.11 % 6 s 71 ns 100 pf 0.10 % 63 s 624 ns 1 nf 0.10 % 628 s 7 s 100 khz 10 pf 0.18 % 628 ns 11 ns 100 pf 0.11 % 6 s 66 ns 1 nf 0.10 % 63 s 619 ns 10 nf 0.10 % 628 s 7 s 10 khz 100 pf 0.18 % 628 ns 11 ns 1 nf 0.11 % 6 s 66 ns 10 nf 0.10 % 63 s 619 ns 100 nf 0.10 % 628 s 7 s 1 khz 100 pf 0.92 % 63 ns 6 ns 1 nf 0.18 % 628 ns 11 ns 10 nf 0.11 % 6 s 66 ns 100 nf 0.10 % 63 s 619 ns 1. the capacitance and conductance measurement accuracy is speci? ed under the following conditions: d x = 0.1 integration time: 1 plc test signal level: 30 mvrms at four-terminal pair port of mfcmu
10 for gswu input: control port: for scuu mini pin plug ports: guard1, guard2 output: led: connection status indicator scuu supplemental information smu path: offset current: < 20 fa offset voltage: < 100 v at 300 sec closed channel residual resistance: < 200 m? channel isolation resistance: > 10 15 ? cmu path: test signal signal output level additional errors (cmu bias, open load): 2 % (direct docking) 7 % (indirect docking) signal output level additional errors (smu bias, open load): 5 % (direct docking, 10 khz) 10 % (indirect docking, 10 khz) output impedance: 50 ?, typical signal level monitor additional errors (open load): 2 % (cmu bias), direct docking 5 % (smu bias), direct docking 7 % (cmu bias), indirect docking 10 % (smu bias), indirect docking dc bias function dc voltage bias (cmu bias): range: 0 to 25 v resolution: 1 mv additional errors (for cmu bias): 100 v (open load) dc voltage bias (smu bias): range: 0 to 100 v resolution: 5 mv additional errors (for smu voltage output accuracy): 100 v (open load) dc bias monitor additional errors (open load): 20 mv, direct docking 30 mv, indirect docking output impedance: 50 ?, typical dc output resistance: 50 ? (cmu bias), 130 ? (smu bias) measurement accuracy impedance measurement error is given by adding the following additional error e e to the mfcmu measurement error. e e = (a + z s /|z x | + y o |z x |) x 100 (%) z x : impedance measurement value (?) a: 0.05 % (direct docking) or 0.1 % (indirect docking) z s : 500 + 500 x f (m?) y o : 1 + 1000 x f/100 (ns) (direct docking, x2 for indirect docking) note: f is frequency in mhz. when the measurement terminals are extended by using the measurement cable, the measurement accuracy is applied to the data measured after performing the open/short/load correction at the dut side cable end. note: the error is speci? ed under the following conditions: temperature: 23 c 5 c integration time: 1 plc or 16 plc atto-sense and switch unit (asu) speci? cations aux path speci? cation maximum voltage 100 v (aux input to aux common) 100 v (aux input to circuit common) 42 v (aux common to circuit common) maximum current 0.5 a (aux input to force output) asu supplemental information band width (at -3 db) 30 mhz (aux port) smu cmu unify unit (scuu) and guard switch unit (gswu) speci? cations the scuu multiplexes the outputs from two smus (mpsmus and/or hrsmus) and the cmu. the scuu outputs are two sets of kelvin triaxial ports (force and sense). the scuu also allows the smus to act as dc bias sources in conjunction with the cmu. special cables are available to connect the smus and cmu with the scuu, and an auto-detect feature automatically compensates for the cable length going to the scuu. the gswu contains a relay that auto- matically opens for iv measurements and closes for cv measurements, forming a guard return path to improve cv measure- ment accuracy. supported smu mpsmu and hrsmu for scuu inputs: triaxial ports: force1, sense1, force2, and sense2 bnc ports: for mfcmu control port: for mfcmu outputs: triaxial ports: force1/cmuh, sense1, force2/cmul, and sense2 control port: for gswu leds: smu/cmu output status indicator docking mode: direct and indirect mode
11 pulse range and pulse parameter1 frequency range 0.1 hz to 33 mhz pulse period programmable range 30 ns to 10 s resolution 10 ns minimum 100 ns3 accuracy 1 % (0.01 % 2) width programmable range 10 ns to (period C 10 ns) resolution 2.5 ns (tr and tf 8 s) 10 ns (tr or tf > 8 s) minimum 50 ns (25 ns typical)3 accuracy (3 % + 2 ns) transition time 5 (tr and tf) programmable range 8 ns to 400 ms resolution 2 ns (tr and tf 8 s) 8 ns (tr or tf > 8 s) minimum (typical) < 15 ns3 minimum 20 ns (vamp 10 v) 30 ns (vamp 20 v) 60 ns (vamp > 20 v) accuracy C5 % to 5 % + 10 ns (vamp 10 v) C5 % to 5 % + 20 ns (vamp 20 v) output relay switching time 4 open/close < 100 s 1. unless otherwise stated, all speci? cations assume a 50 ? termination. 2. typical minimum. this is supplemental information. 3. this is speci? ed at vamp 10 v. 4. the time it takes the open state relay to open or close. 5. the time from 10 % to 90 % of vamp which is the amplitude of output pulse. tperiod twidth tdelay vamp vpeak vbase tr tf 90% 90% 10% 10% speci? cations number of output channels: 2 channels per module modes: pulse, constant, and freerun standard pulse mode: ? two level pulse ? three level pulse per one channel ? pulse period: 30 ns to 10 s delay range: 0 s to 9.99 s delay resolution: 2.5 ns (minimum) output count: 1 to 1,000,000 voltage monitor minimum sampling period: 5 s trigger output: level: ttl timing: synchronized with pulse period trigger width: pulse period x 1/2 (pulse period 10 s) maximum 5 s (pulse period > 10 s) spgu supplemental information pulse width jitter: 0.001 % +150 ps pulse period jitter: 0.001 % +150 ps maximum slew rate: 1000 v/s (50 ? load) noise: 10 mv rms (at dc output) advanced feature: voltage monitor: the hv-spgu has a voltage monitor function to measure the voltage at the dut terminal. measurement accuracy (open load): (0.1 % of reading + 25 mv) measurement resolution: 50 v note: speci? ed at 1 plc (20 ms = (5 s sample + 5 s interval) x 2000 samples.) voltage compensation: the hv-spgu can measure the impedance of dut and adjust the output voltage according to the dut impedance. alwg (arbitrary linear waveform generator) function arbitrary linear waveform generator (alwg) mode: ? output complex waveform per one channel of hv-spgu ? de? ne multi-level pulse and multi-pulse waveform including open state pulse with alwg gui editor ? sequential pulse waveform from user-de? ned pulse waveform ? 1024 points per one channel ? programmable timing range: 10 ns to 10 s, 10 ns resolution pulse waveform pulse/dc output voltage and accuracy output voltage (vout) 50 ? load C20 v to +20 v open load C40 v to +40 v accuracy1 open load (0.5 % + 50 mv) amplitude resolution 50 ? load 0.2 mv (10 v range) 0.8 mv (40 v range) open load 0.4 mv (10 v range) 1.6 mv (40 v range) output connectors sma source impedance 50 ?2 short circuit current 800 ma peak (400 ma average3) overshoot/ pre-shoot/ringing 4 50 ? load (5 % + 20 mv) output limit monitoring over current limit 1. at 1 s after completing transition. 2. typical (1 %) 3. this value is speci? ed under the following condition: [(number of installed hv-spgus) x 0.2 a] + [dc current output by all modules (including hv-spgus)] < 3.0 a 4. following the speci? ed condition with transition time. hv-spgu (high voltage semiconductor pulse generator unit) module speci? cation
12 point time voltage 1 0 0.0 v 2 50 ns 0.0 v 3 70 ns 15.0 v 4 100 ns 15.0 v 5 200 ns 0.0 v 6 300 ns 0.0 v 7 320 ns 10.0 v 8 400 ns 10.0 v 9 450 ns 0.0 v 10 500 ns 0.0 v pattern p1 p4 p3 p7 p8 p9 p6 p5 p2 p10 0 500 ns 15 10 0 pattern 1 pattern 2 pattern 2 x 5 pattern 3 example 1. alwg setup table and pattern example 2. alwg complex waveform 16440a smu/pulse generator selector the agilent 16440a smu/pulse generator selector switches either a smu or pgu to the associated output port. you can expand to four channels by adding an additional 16440a. the pgu port on channel 1 provides a pgu open function, which can disconnect the pgu by opening a semiconductor relay. the agilent B1500A and 16445a are required to use the 16440a. the following speci? cations data is speci? ed at 23 c 5 c and 50% relative humidity. ? channel con? guration: 2 channels (ch 1 and ch 2). can add an additional 2 channels (ch 3 and ch 4) by adding another 16440a (selector expander). input output channel 1 (ch 1) 2 (smu and pgu 1 ) 1 channel 2 (ch 2) 2 (smu and pgu) 1 channel 3 (ch 3) 2 2 (smu and pgu 1 ) 1 channel 4 (ch 4) 2 2 (smu and pgu) 1 1. pgu channels 1 & 3 have a built-in series semiconductor relay. 2. available when a second 16440a (selector expander) is installed. ? voltage and current range input port maximum voltage maximum current smu 200 v 1.0 a pgu 40 v 0.2 a 1 1. this is peak-to-peak ac current. 16445a smu/pgu selector connection adaptor the agilent 16445a selector adapter is required to control and to supply dc power to the agilent 16440a smu/pulse generator selector. power requirement: 100 to 240 v, 50/60 hz maximum volt-amps (va): 20 va
13 overview the wgfmu is a self-contained module offering the combination of arbitrary linear waveform generation (alwg) with synchronized fast current or voltage (iv) measurement. the alwg function allows you to generate not only dc, but also various types of ac waveforms. in addition to this versatile sourcing capability, the wgfmu can also perform measurement in synchronization with the applied wave- form, which enables accurate high-speed iv characterization. speci? cations number of output channels: 2 channels per module modes: fast iv, pg (pulse generator), dc, and smu pass-through rsu: output connector: sma source impedance: 50 (nominal) at dc in pg mode smu path: maximum voltage 25 v, maximum current 100 ma v monitor terminal: connector: bnc source impedance: 50 (nominal) at dc the terminal outputs a buffered signal equal to 1/10 of vout (into a 50 load) wgfmu to rsu cable length: the wgfmu and rsu are connected by a special composite cable. the following con? gurations are available: ? 3 m ? 5 m ? 1.5 m ? 2.4 m + connector adapter + 0.6 m ? 4.4 m + connector adapter + 0.6 m note: the connector adapter is used when routing the cable through the probers connector panel. measurement functions, voltage forcing, voltage measurement, and current measurement mode function v force ranges v measure ranges i measure ranges fast iv v force/i measure, v force/v measure -3 v to +3 v -5 v to +5 v -10 v to 0 v 0 v to +10 v -5 v to +5 v -10 v to +10 v 1 a, 10 a, 100 a, 1 ma, 10 ma. pg v force/v measure -3 v to +3 v -5 v to +5 v -5 v to +5 v dc v force/i measure, v force/v measure -3 v to +3 v -5 v to +5 v -10 v to 0 v 0 v to +10 v -5 v to +5 v -10 v to 10 v 1 a, 10 a, 100 a, 1 ma, 10 ma smu pass- through measurement using smu max 25 v max 100 ma voltage force accuracy, resolution, and timing v force (fast iv mode) -5 v to 5 v, -10 v to 0 v, 0 v to 10 v v force (pg mode) -5 v to 5 v (open load) -2.5 v to 2.5 v (50 load) accuracy 0.1% of setting 0.1% of range 1 resolution 2 96 v (-3 to 3v) 160 v (all ranges except for -3 v to 3 v) overshoot/undershoot (5%+20 mv) 3 noise maximum 0.1 mv rms 4 rise time t rise (10 to 90%)/ fall time t fall (90 to 10%) accuracy: -5% to (+5% +10 ns) of setting 5 minimum: 24 ns, pg mode and 50 load pulse period timing accuracy: 1% of setting 6 minimum:100 ns, pg mode and 50 load pulse width accuracy: (3%+2 ns) 7 minimum: 50 ns, pg mode and 50 load voltage measurement accuracy, resolution, and noise accuracy (0.1% of reading 0.1% of range) 8 resolution 9 680 v (-5 v to +5 v range) 1.4 mv (-10 v to +10 v range) noise 10 maximum 4 mv rms (-5 v to +5 v range) 1. independent of the range or the mode. dc constant voltage output. load impedance must be 1 m (1 a range) or 200 k (all other current ranges) for fast iv mode, or 1 m for pg mode. 2. can vary at most 5% based on the result of calibration. 3. pg mode, 50 load, t rise and t fall >16 ns with the 1.5 m cable, >32 ns with 3 m cable, or >56 ns with 5 m cable 4. theoretical value for observed time 100 ns to 1 ms, supplemental information 5. pg mode, 50 load, t rise and t fall 24 ns 6. pg mode, 50 load, pulse period 100 ns 7. pg mode, 50 load, pulse width 50 ns 8. independent of the range or the mode. dc constant voltage output. applicable condition: 10,000 averaging samples for 10 a range and above; 100,000 averaging samples for the 1 a range. 9. display resolution. can vary at most 5% based on the result of calibration. 10. 0 v output, open load, no averaging. maximum 1.5 mv rms as supplemental information. wgfmu (waveform generator/fast measurement unit) module speci? cation
14 current measurement accuracy and resolution accuracy (0.1% of reading 0.2% of range) 1 resolution 2 0.014% of range noise (effective resolution) maximum 0.2% of range 3 1. independent of the range or the mode. dc constant voltage output. applicable condition: 10,000 averaging samples for 10 a range and above; 100,000 averaging samples for the 1 a range. 2. display resolution. can vary at most 5% based on the result of calibration 3. effective value at 0 v output, open load, and no averaging. supplemental information alwg function maximum number of vectors 2048 maximum number of sequences 512 maximum number of loop counts 1 to 10 12 length of a vector 10 ns to 10,000 s with 10 ns resolution sampling rate 5 ns, or 10 ns to 1 s with 10 ns resolution averaging time 10 ns to 20 ms with 10 ns resolution hardware memory about 4 m data points/channel (typical) trigger output level: ttl trigger width: 10 ns generated synchronously with alwg waveform. supplemental information rsu smu path: leak current: < 100 pa residual resistance: <300 m jitter: <1 ns skew between channels: <3 ns, under no electrostatic discharge condition. trigger output skew: <3 ns current range change time: <150 s* * the time until the measured current settles within 0.3 % of the ? nal result value after the range change. minimum rise/fall time* mode current measure- ment range minimum rise/fall time load condition 0 to 1v 0 to 5 v 0 to 10v pg mode na 30 ns 30 ns na 25 pf, open fast iv mode 10 ma 80 ns 80 ns 80 ns 25 pf, 1 m 1 ma 250 ns 250 ns 250 ns 100 a 600 ns 600 ns 1.5 s 10 a 2 s 4.5 s 7 s 1 a 6 s 35 s 75 s 25 pf, open * this is the minimum setting value effective for suppressing overshoot and distortion.
15 settling time* mode current measurement range settling time load condition voltage measurement current measurement pg mode na 150 ns na 25 pf, open fast iv mode 10 ma 150 ns 100 ns 25 pf, 1 k 1 ma 150 ns 250 ns 25 pf, 10 k 100 a 400 ns 1s 25 pf, 100 k 10 a 1.2 s 10 s 25 pf, 1 m 1 a 6 s 80 s 25 pf, 10 m * the time until the measured value settles within 0.3 % of the ? nal result value after the output voltage is changed from the initial value (0 v). applicable condition: rise time = 10 ns minimum pulse width* mode current measurement range minimum pulse width load condition pg mode na 170 ns 25 pf, open fast iv mode 10 ma 180 ns 25 pf, 1 k 1 ma 500 ns 25 pf, 10 k 100 a 1.6 s 25 pf, 100 k 10 a 14.5 s 25 pf, 1 m 1 a 115 s 25 pf, 10 m * the time until the pulse peak output value (0 to 5 v) settles within 0.3% of the setup value after the output voltage is changed from the initial value (0 v). applicable condition: rise time is set to the minimum rise/fall time shown in the above table. software instrument library for wgfmu control operating system: microsoft windows xp professional sp2 and windows vista business sp1 nbti and general-purpose easyexpert application tests sample programs (nbti and general- purpose measurement using wgfmu and rts data analysis) wgfmu supported prober vendors cascade microtech suss microtec vector semicon note: the maximum number of installable rsus for a given prober depends upon the available space. please contact your local sales representative for details on connecting and mounting the wgfmu and rsu.
16 var1 primary sweep controls the staircase (dc or pulsed) voltage or current sweep. maximum number of var1 steps: n 1 = 1001 var2 subordinate linear staircase or linear pulsed sweep. after primary sweep is completed, the var2 unit output voltage or current is changed. maximum number of var2 steps: n 2 = 1001 (1 n 1 n 2 128128) var1 staircase or pulse sweep synchronized with the var1 sweep. sweep is made with a user speci? ed ratio and offset value. var1 output is calculated as var1 = a x var1 + b, where a is the user speci? ed ratio and b is the user speci? ed offset value. const a source unit can be set as a constant voltage or current source depending on the unit. staircase sweep measurement mode forces swept voltage or current, and measures dc voltage or current. one channel can sweep current or voltage while up to ten channels can measure current or voltage. a second channel can be synchronized with the primary sweep channel as an additional voltage or current sweep source. number of steps: 1 to 1001 sweep mode: linear or logarithmic (log) sweep direction: single or double sweep hold time: 0 to 655.35 s, 10 ms resolution delay time: 0 to 65.5350 s, 100 s resolution pulsed sweep measurement mode: forces pulsed swept voltage or current, and measures dc voltage or current. a second channel can be programmed to output a staircase sweep voltage or current synchronized with the pulsed sweep output. staircase sweep with pulsed bias measurement mode forces swept voltage or current, and measures dc voltage or current. a second channel can be programmed to output a pulsed bias voltage or current. a third channel can be synchronized with the primary sweep channel as an additional voltage or current sweep source. sampling (time domain) measurement mode displays the time sampled voltage/current data (by smu) versus time. sampling channels: up to 10 sampling mode: linear, logarithmic (log) sampling points: for linear sampling: 1 to 100,001/(number of channels) for log sampling: 1 to 1+ (number of data for 11 decades) sampling interval range: 100 s +20 s x (num. of channels C 1) to 2 ms, 10 s resolution 2 ms to 65.535 s, 1 ms resolution hold time, bias hold time: -90 ms to -100 s, 100 s resolution 0 to 655.35 s, 10 ms resolution measurement time resolution: 100 s standby mode smus in standby remain programmed to their speci? ed output value even as other units are reset for the next measurement. current offset cancel this function subtracts the offset current from the current measurement raw data, and returns the result as the measurement data. this function is used to compensate the error factor (offset current) caused by the measurement path such as the measurement cables, manipulators, or probe card. time stamp the B1500A supports a time stamp function utilizing an internal quartz clock. resolution: 100 s other measurement characteristics measurement control: single, repeat, append, and stop smu setting capabilities: limited auto ranging, voltage/current compliance, power compliance, auto- matic sweep abort functions, self-test, and self-calibration functions operation mode: application test mode, classic test mode, quick test mode key features ? categorized and prede? ned application test library ? gui-based application test editor ? save/recall my favorite setups ? de? ne/customize application library ? execute measurement (single/repeat/append) ? quick test execution ? direct control (gpib flex) ? save/recall measurement data and settings ? test result data management ? import/export device de? nition, measurement settings, my favorite setup, measurement data, and application library ? graph plot display/analysis/printing ? switching matrix control ? workspace management ? self-test, self-calibration, diagnostics application library sample application tests are supplied for the following categories; they are subject to change without notice. structure, cmos, bipolar (bjt), memory, mixed signal device, tft, discrete, reliability, power device, nanotechnology, utility measurement mode details the agilent B1500A supports the following measurement modes: ? staircase sweep ? multi-channel sweep1 ? pulsed sweep ? staircase sweep with pulsed bias ? iv sampling ? high speed iv sampling ? cv sweep ? c-t sampling ? c-f sweep ? list sweep ? linear search2 ? binary search2 1. easyexpert does not support var1 in multi-channel sweep mode. 2. they are supported by flex command only. each smu can be set to var1 (primary sweep), var2 (secondary sweep), var1 (synchronous sweep), or const (constant voltage/current source). agilent easyexpert software
17 arithmetic and analysis functions user functions up to 20 user-de? ned functions can be de? ned using arithmetic expressions. measured data and pre-de? ned variables can be used in the computation. the results can be displayed on the lcd. arithmetic operators +, -, *, /, ^, abs (absolute value), at (arc tangent), avg (averaging), cond (conditional evaluation), delta, diff (differ- ential), exp (exponent), integ (integration), lgt (logarithm, base 10), log (logarithm, base e), mavg (moving average), max, min, sqrt, trigonometric function, inverse trigonometric function, and so on. physical constants keyboard constants are stored in memory as follows: q: electron charge, 1.602177e-19 c k: boltzmans constant, 1.380658e-23 (e): dielectric constant of vacuum, 8.854188e-12 engineering units the following unit symbols are also available on the keyboard: a (10 -18 ), f (10 -15 ), p (10 -12 ), n (10 -9 ), u or (10 -6 ), m (10 -3 ), k (10 3 ), m (10 6 ), g (10 9 ), t (10 12 ) , p (10 15 ) analysis capabilities overlay graph comparison graphical plots can be stored and overlaid. scale auto scale and zoom marker marker to min/max, interpolation, direct marker, and marker skip cursor direct cursor line two lines, normal mode, grad mode, tangent mode, and regression mode automatic analysis function on a graphics plot, the markers and lines can be automatically located using the auto analysis setup. parameters can be automatically determined using automatic analysis, user function, and read out functions. data variable display up to 20 user-de? ned parameters can be displayed on the graphics screen. analysis functions up to 20 user-de? ned analysis func- tions can be de? ned using arithmetic expressions. measured data, pre-de? ned variables, and read out functions can be used in the computation. the results can be displayed on the lcd. read out functions the read out functions are built-in func- tions for reading various values related to the marker, cursor, or line. graph plot display mode data display window can be printed. only x-y graph can be printed. graph plot ? le graph plot can be stored as image data to clip board or mass storage device. file type: bmp, gif, png, emf output display mode x-y graph, list, and parameter x-y graph display x-axis and up to eight y-axes, linear and log scale, real time graph plotting list display measurement data and calculated user function data are listed in conjunction with var1 step number or time domain sampling step number. up to 20 data sets can be displayed. other functions import/export ? les file type: agilent easyexpert format, xml-ss format, csv format data storage hard disk drive, dvd-rom/cd-r/cd-rw drive interfaces gpib, interlock, usb (usb 2.0, front 2, rear 2), lan (100base-tx/10base-t), trigger in/out, digital i/o trigger i/o only available using gpib flex commands. trigger in/out synchronization pulses before and after setting and measuring dc voltage and current. arbitrary trigger events can be masked or activated independently. supported external instruments easyexpert standard edition: ? supported by switching matrix gui: b2200a/b2201a ? supported by application tests: e5250a (e5252a cards), 4284a/e4980a, 81110a, 3458a easyexpert plus edition: ? all external instruments supported by easyexpert standard edition ? also supported by switching matrix gui: e5250a (e5252a cards) furnished software ? prober control execution ? les ? desktop easyexpert software with license-to-use for standard edition ? 4155/56 setup ? le converter tool (supported operating systems: microsoft windows 2000 professional, xp home or professional, and vista business) ? a vxi plug&play driver for the B1500A (supported operating systems: microsoft windows 2000 professional and xp professional)
18 prober control all popular semiautomatic wafer probers are supported by desktop easyexpert. you can de? ne wafer, die, and module information for probing across an entire wafer. you can also combine wafer prober control with either quick test mode or an application test based test sequence to perform multiple testing on various devices across the wafer. automatic data export the desktop easyexpert has the ability to automatically export measurement data in real time, in a variety of formats. you can save data to any drive connected to the pc. if you wish, you can export data to a network drive and view test results on your desktop pc as your instruments are performing the testing in your lab. system requirements the following are the minimum require- ment for executing desktop easyexpert. supported instruments ? B1500A ? 4155b, 4156b, 4155c, and 4156c ? supported 4155/4156 ? rmware: hostc: 03.08 or later smuc: 04.08 or later supported external instruments desktop easyexpert standard edition: ? supported by switching matrix gui: b2200a/b2201a ? supported by application tests: e5250a (e5252a cards), 4284a/e4980a, 81110a, 3458a desktop easyexpert plus edition: ? all external instruments supported by desktop easyexpert standard edition ? also supported by switching matrix gui: e5250a (e5252a cards) desktop easyexpert is the same software that is built-in to the pc-based agilent B1500A semiconductor device analyzer, except that it runs on a stand- alone pc. just like standard easyexpert, desktop easyexpert supports all aspects of parametric test, from basic manual measurements to test automation across a wafer in conjunction with a semi- automatic wafer prober. features and bene? ts large application test library desktop easyexpert comes with over 200 application tests conveniently organized by device type, application, and technology. many of these application tests will run on the 4155/4156 without modi? cation, and you can easily edit and customize the furnished application tests to ? t your speci? c needs. of? ine capability desktop easyexpert can be run in either online or of? ine mode. in the of? ine mode you can perform tasks such as analyzing data and creating new application tests. this frees up your existing analyzer from being needed for development work and enables you to use it for its primary purpose: making measurements. gui-based classic test mode desktop easyexpert offers a classic test mode that maintains the look, feel, and terminology of the 4155/4156 user interface. in addition, it improves the 4155/4156 user interface by taking full advantage of microsoft windows gui features. easy test sequencing a gui-based quick test mode enables you to perform test sequencing without programming. you can select, copy, rear- range and cut-and-paste any application tests with a few simple mouse clicks. once you have selected and arranged your tests, simply click on the measurement button to begin running an automated test sequence. agilent desktop easyexpert software operating system and service pack microsoft windows xp professional sp2 microsoft windows vista business sp1 processer intel celeron 2 ghz vista certi? ed pc with 1gb memory memory 512 megabytes ddr266 display xga 1024x768 (sxga 1280x1024 recommended) hdd 1 gb free space on the c drive, 10 gb (30 gb recommended) free space on a drive for test setup/result data strage. .net framework microsoft .net framework ver. 2.0 redistributable package microsoft .net framework 2.0 sp1 microsoft .net framework ver. 3.0 io libraries (for online mode) agilent io libraries suite 15.0 agilent io libraries suite 15.0 supported gpib i/f (for online mode) B1500A 4155b/c 4156b/c agilent 82350b o o agilent 82357a x o agilent 82357b x o o = supported x = not supported
19 supported 4155/4156 functionality desktop easyexpert standard edition: ? i/v sweep ? b2200a and b2201a switching matrix gui control desktop easyexpert plus edition: the following functions are additionally supported. ? i/v-t sampling (except thinned out mode) ? vsu/vmu (except differential voltage measurement using vmu) ? pgu (41501b) ? e5250a/e5252a switching matrix gui control setup converter tool in addition to desktop easyexpert, agilent supplies a free setup converter tool that runs on any windows-based pc. this tool can convert 4155 and 4156 measurement setup ? les (? le extensions mes or dat) into equivalent desktop easyexpert classic test mode setup ? les. general speci? cations temperature range operating: +5 c to +40 c storage: -20 c to +60 c humidity range operating: 20 % to 70 % rh, non-condensing storage: 10 % to 90 % rh, non-condensing altitude operating: 0 m to 2,000 m (6,561 ft) storage: 0 m to 4,600 m (15,092 ft) power requirement ac voltage: 90 v to 264 v line frequency: 47 hz to 63 hz maximum volt-amps (va) B1500A: 900 va regulatory compliance emc: iec61326-1:+a1/en61326-1:+a1 as/nzs 2064.1 safety: csa c22.2 no.1010.1-1992 iec61010-1:+a2/en61010-1:+a2 ul3111-1:1994 certi? cation ce, csa, nrtl/c, c-tick dimensions B1500A: 420 mm w x 330 mm h x 575 mm d n1301a-100 smu cmu unify unit: 148 mm w x 75 mm h x 70 mm d n1301a-200 guard switch unit: 33.2 mm w x 41.5 mm h x 32.8 mm d e5288a atto-sense and switch unit: 132 mm w 88.5 mm h 50 mm d b1531a rsu: 45.2 mm w x 70 mm h x 82 mm d 16440a smu/pgu selector: 250 mm w 50 mm h 275 mm d 16445a selector adaptor: 250 mm w 50 mm h 260 mm d weight B1500A (empty): 20 kg b1510a: 2.0 kg b1511a: 1.0 kg b1517a: 1.2 kg b1520a: 1.5 kg b1525a: 1.3 kg b1530a: 1.3 kg b1531a: 0.13 kg e5288a: 0.5 kg n1301a-100: 0.8 kg n1301a-200: 0.1 kg 16440a: 1.1 kg 16445a: 1.0 kg furnished accessories power cable manual cd-rom desktop easyexpert cd-rom software cd-rom (including vxi plug&play driver and utility tools) license-to-use for desktop easyexpert standard edition
20 order information mainframe and modules B1500A semiconductor device analyzer mainframe the following modules are available: high power smu (hpsmu) medium power smu (mpsmu) high resolution smu (hrsmu) atto-sense switch unit (asu) multi frequency cmu (mfcmu) high voltage spgu (hv-spgu) waveform generator/fast measurement unit (wgfmu) B1500A-050 50 hz line frequency B1500A-060 60 hz line frequency B1500A-a6j ansi z540 compliant calibration B1500A-uk6 commercial calibration certi? cate with test data B1500A-aba english documentation B1500A-abj japanese documentation b1540a-001 agilent easyexpert with license-to-use for standard version b1540a-002 license-to-use for agilent easyexpert plus b1541a agilent desktop easyexpert software and measurement libraries b1541a-001 agilent desktop easyexpert with license-to-use for standard version b1541a-002 license-to-use for agilent desktop easyexpert plus b1500 accessories 16444a-001 keyboard 16444a-002 mouse 16444a-003 stylus pen n1253a-100 digital i/o cable n1253a-200 digital i/o bnc box n1254a-100 gndu to kelvin adapter n1254a-108 asu magnetic stand smu cables 16494a-001 triaxial cable (1.5 m) 16494a-002 triaxial cable (3 m) 16493k-001 kelvin triaxial cable (1.5 m) 16493k-002 kelvin triaxial cable (3 m) cmu accessories n1300a-001 cmu cable (1.5 m) n1300a-002 cmu cable (3 m) n1301a-100 smu cmu unify unit (scuu) n1301a-102 smu cmu unify unit cable (3 m) n1301a-110 smu cmu unify unit magnetic stand n1301a-200 guard switch unit (gswu) n1301a-201 guard switch unit cable (1 m) n1301a-202 guard switch unit cable (3 m) hv-spgu accessories 16440a smu/pgu selector 16440a-003 control cable (40 cm) 16445a smu/pgu selector connection adapter 16445a-001 control cable for B1500A to 16440a (1.5 m) 16445a-002 control cable for B1500A to 16440a (3 m) 16493p-001 spgu cable (1.5 m) 16493p-002 spgu cable (3 m) 16493q-001 spgu synchronization cable wgfmu accessories 16493r wgfmu cables and accessories 16493r-001 0.6 m cable between wgfmu and rsu 16493r-002 2.4 m cable between wgfmu and rsu 16493r-003 3 m cable between wgfmu and rsu 16493r-004 5 m cable between wgfmu and rsu 16493r-005 4.4 m cable between wgfmu and rsu 16493r-006 1.5 m cable between wgfmu and rsu 16493r-101 ssmc-ssmc cable (50 mm) for current return path 16493r-102 ssmc-ssmc cable (70 mm) for current return path 16493r-202 sma-ssmc cable (200 mm) between rsu and dc probe 16493r-302 sma-sma cable (200 mm) between rsu and rf probe 16493r-801 wgfmu connector adapter (female-female) 16493r-802 magnet stand for rsu 16493r-803 sync cable for wgfmu other accessories 16442b test ? xture 16493g digital i/o cable 16493j-001 interlock cable (1.5 m) 16493j-002 interlock cable (3 m) 16493l-001 gndu cable (1.5 m) 16493l-002 gndu cable (3 m) part numbers for adding additional modules b1510a high power source/monitor unit module b1511a medium power source/monitor unit module b1517a high resolution source/monitor unit module e5288a atto-sense and switch unit b1520a multi frequency capacitance measurement unit module b1525a high voltage semiconductor pulse generator unit module b1530a waveform generator/fast measurement unit module
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